WebThe polarization multiplexing technique is a well-established method that improves the communication capacity of an optical system. In this paper, we designed orthogonal linear and circular polarization multiplexing metalens using a library of rectangle TiO2 nanostructures. The former can independently focus x- and y-linearly polarized incident …

Computational image translation from Mueller matrix polarimetry …

Web8 sept. 2011 · The use of optical metrology techniques for process control is now widespread. These techniques are fast and nondestructive, allowing higher throughputs than non-optical techniques like electron microscopies or AFM. We present here new developments using complete Mueller polarimetry in the back focal plane of a … WebThus, Mueller polarimetry in the Fourier space (MPFS) offers more parameters for the process quality control compared with conventional spectroscopic ellipsometry (SE). It means that MPFS should be more efficient than SE for the overlay characterization in microelectronic industry. Paper Details Date Published: 24 August 2010 PDF: 10 pages covington ky occupational tax form

Overlay measurements by Mueller polarimetry in back focal plane

WebA new Mueller polarimeter based on liquid crystals and a microscope objective is presented, for the characterization of diffraction gratings in a conical diffraction mounting. … WebMueller matrix (MM) polarimetry can provide comprehensive information about the polarization properties that are closely related to the microstructural features and has … WebThus, using Mueller polarimetry in back focal plane for overlay detection does not require the numerical solution of the inverse electromagnetic problem of polarized light scattering on periodic structures provided two calibrated target with known overlay values are available. Another advantage of this approach is the ability to perform the ... covington ky occupational license form